Compact End Block (CEB)

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The Compact End Block is a solid and reliable type of rotatable magnetron. Its proven reliability, fast integration in the coater and flexibility in setting the appropriate target-substrate distance makes the CEB an ideal solution for medium-power applications in new or existing coaters. Furthermore it is easy to maintain since it can be completely dismantled. The double vacuum and water sealing avoids unplanned coater stops. And finally it’s also easy to install. It takes less than 10 minutes for a magnetron exchange and less than 15 minutes for a target exchange. The CEB can be combined with several components (e.g. magnet bar, elongation parts, sputter electronics, gas distribution and control systems) to obtain accurate process control.

Features
  • All functionalities on one end block
  • Only limited space needed inside vacuum chamber
  • Loose or supported counter center
  • Horizontal, vertical or tilted use
  • DC, pulsed DC and MF switching at medium power levels
Benefits
  • Flexibility in setting the appropriate target-substrate distance
  • Completely dismountable for easy maintenance
  • Fast integration in coater
  • Ideal solution for medium-power applications in new or existing coaters
  • Double vacuum and water sealing to avoid unplanned coater stops
  • Proven reliability
  • Easy to install:
    • Less than 10 minutes for a magnetron exchange
    • Less than 15 minutes for a target exchange

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