INFICON

- Model IC6 - Thin Film Deposition Controller

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The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.

  • INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
  • Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
  • Codeposition of up to six sources simultaneously
  • Color TFT LCD display makes it easy to see what's going on with your process
  • +/-0.0035 Hz over 100ms sample
  • USB data storage for screen shots, recipe storage and data logging
  • Powerful I/O with flexibility to integrate into simple or complex systems (using expandable Inputs (28) and Outputs (24 Relays, 14 TTL outputs), and use of logic functions (100 logic statements)
  • 6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
  • Can accommodate up to 50 processes of 200 layers each and processes can be linked together for a maximum of 10,000 layers
  • Multiple sensor averaging for up to 8 sensors
  • 4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
  • Optional Ethernet communications
  • RoHS compliant

  • Measurement Performance:
    • Frequency resolution : ±0.0035 Hz @ 6 MHz
    • Thickness and rate resolution/measurement (1) : ±0.00433 Å
    • Measurement frequency range : 6.0 to 4.5 MHz (fixed)
    • Thickness accuracy (2) : 0.5%
    • Measurement interval : 0.10 s
    • Multiple measurement averaging : 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 sec. averaging allowed
  • Design Features:
    • Auto Z : yes
    • Autotone : yes
    • Co-deposition : yes (up to 6 sources)
  • Process Recipe & Data Management:
    • Material programs : 32
    • Process layers (per process) : 200
    • Processes : 50 (processes can be linked together)
    • USB memory : yes
    • Data logging : yes
  • Hardware Features:
    • Sensors (3)        
    • Single : 8
    • Dual / CrystalTwo® : 4 / 8 (with CrystalTwo® Switch)
    • CrystalSix® : 8
    • Crystal 12® : 8
    • Generic : 8
  • Source Controls
    • Number of sources (4) : up to 6
    • Source control voltages : 0 to +/-10 V, adjustable
    • Output resolution : 15 bits over full range (0 to 10V)
    • Crucible positions : 64
  • Inputs / Outputs        
    • Inputs : 14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground
    • Outputs : 8 standard, up to 24 optional programmable SPST relays rated at 30 V(dc) or 30 V(ac) RMS or 42 V peak @ 2.5 amps; 14 optional TTL outputs
    • Recorder output (4) : 0 to +10 V, adjustable
    • Logic statements : 100 fully programmable; up to 5 actions, 5 events per statement
    • Communications        
    • Standard : RS232
    • Optional : Ethernet
  • Display
    • Thickness resolution :
      • 1 Å for 0 to 9.999 kÅ
      • 10 Å for 10.00 to 99.99 kÅ
      • 100 Å for 100.0 to 999.9 kÅ
      • 1 kÅ for 1000 to 9999 kÅ
    • Rate resolution :
      • 0.001 for 0 to 9.999 Å/s if rate filter time setting is 10 seconds or greater
      • 0.01 for 0 to 99.99 Å/s
      • 0.1 for 100 to 999.9 Å/s
  • Operation:
    • Power requirements :
      • 100 – 230 V (ac) +/- 15%
      • 50 / 60 Hz +/- 3 Hz
    • Operating temperature : 0 to 50 C (32 to 122 F)
    • Dimensions, excluding mounts (h x w x d) : 5.25” x 19” x 13” (133mm x 483mm x 330 mm)
    • Weight : 23 lbs (10.5 kg)

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