Vacuum Sputtering & Thermal Coating System
Two cathode magnetron with 3 degree of freedom adjustment. DC power supply with automatically matching box. Boat holder and current display. Thermal evaporation platform with 300 A current. Double layer water cooled vacuum chamber. Two stage backup rotary pump Turbo molecular pump for high vacuum. Backup rotary pump. Smart valve for turbo pump with touch screen monitor. Electro pneumatic valves. Crystal thickness monitor with 1nm resolution and 4 sensor holder. Substrate holder with electronic shutter and electronic feed through four Magnetron. Smart valve for turbo pump. Touch screen interface.